Industrial Ceramic Chuck

Industrial Ceramic Chuck

In the semiconductor field, wafer thinning and dicing have become relatively mature after years of development, and wafer thinning equipment is also becoming increasingly sophisticated. Ceramic chucks are used as loading fixtures when processing wafers. The adsorption area of the ceramic chuck is made of microporous ceramic that is permeable to air and water, while the outer ring of the ceramic chuck is sealed with dense, non-permeable alumina ceramic to maintain a vacuum, providing good load-bearing and adsorption capabilities.

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